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Large-area 400-mm class coating through the mass production scale of a filtered cathode vacuum arc system

  • Jong-kuk KimEmail author
  • Young-Jun Jang
  • Yong-Jin Kang
  • Dohyun Kim
Conference paper
Part of the Mechanisms and Machine Science book series (Mechan. Machine Science, volume 73)

Abstract

To achieve the mass-production efficiency of hard coating, the thickness uniformity of a large area as well as a high deposition rate are critical. For these reasons, modern coating systems have been developed to achieve high quality coating films. In our previous study, a filtered cathode vacuum arc system (FCVA) was introduced for tribology applications. We were able to grow thick ta-C coating up to 9 μm in thickness using FCVA at a lab scale. The main technologies used to reach this thickness level were controls of temperature and residual stress through coating. In the present study, we further develop our coating system for mass production scale by using multi-carbon cathodes and a large-area coating method.

Keywords

FCVA ta-C mass production large area coating method 

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References

  1. 1.
    J. Robertson, “Diamond-like amorphous carbon”, Mater. Sci. Eng., R37, 129, (2002).CrossRefGoogle Scholar
  2. 2.
    Y. Murata, C. K. Choo, H. Ono, Y. Nahai, and K. Tanaka, Mater. Today: Proceedings 3S, S197–S202, (2016).Google Scholar
  3. 3.
    Y. J. Jang, G. T. Kim, Y. J. Kang, D. S. Kim, and J. K. Kim, “A study on thick coatings of tetrahedral amorphous carbon deposited by filtered cathode vacuum arc plasma”, J. of Mater. Res., Vol. 31, Issue 13, pp. 1957–1963, (2016).CrossRefGoogle Scholar

Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Jong-kuk Kim
    • 1
    Email author
  • Young-Jun Jang
    • 1
  • Yong-Jin Kang
    • 1
  • Dohyun Kim
    • 1
  1. 1.Korea Institute of Materials Science (KIMS)ChangwonKorea

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