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Design and Modeling of Compliant XY Micro-Motion Stage

  • Santosh B. Jadhav
  • Kishor K. Dhande
  • Suhas P. Deshmukh
Conference paper

Abstract

In this study, modular design of compliant planar (XY) motion stage using Parallelogram flexure has been proposed. The Modular design offers flexibility in manufacturing and provides perfectly decoupled large motion range with minimal parasitic error motion, cross axes coupling and better actuator isolation. Analytical model i.e. Pseudo rigid body model (PRBM) has been used to obtain the force-displacement relationship of the stage. Modeling equations have been implemented in Matlab and results have been obtained. Large range linear electromagnetic actuator i.e. voice coil actuator has been used for actuation instead of piezoactuators. The compliant XY stage delivers motion range of 14 mm with parasitic error motions of 150 μm.

Keywords

Compliant Modular Decoupled Parasitic error motion Cross axes coupling etc. 

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Copyright information

© Springer Nature Switzerland AG 2020

Authors and Affiliations

  • Santosh B. Jadhav
    • 1
  • Kishor K. Dhande
    • 1
  • Suhas P. Deshmukh
    • 1
  1. 1.Department of Mechanical EngineeringRajarshi Shahu College of EngineeringPuneIndia

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