Deflection Angle Detection of the Rotor and Signal Processing for a Novel Rotational Gyroscope

  • Dianzhong Chen
  • Zhongzhao ZhangEmail author
Conference paper
Part of the Lecture Notes of the Institute for Computer Sciences, Social Informatics and Telecommunications Engineering book series (LNICST, volume 251)


Differential capacitance detection, a common high resolution proof mass displacement detection scheme, is adopted in the gyroscope to measure the rotor deflection angle by installing an electrode with four poles under the rotor disk, which forms four detection capacitors and opposite ones form a differential capacitance detection pair. Theoretical inference explains the approximately proportional relationship between the capacitance difference and the rotor deflection angle. Simulation in Ansys Maxwell verifies the inference and confirms the differential capacitance detection range of the rotor deflection angle to 0–1°, limited by linearity. A signal processing system is constructed, obtaining a DC output voltage proportional to the measured input angular speed. Experiment shows the fabricated gyroscope with the designed differential capacitance detection pairs exhibits excellent performance with the resolution and the bias stability of 0.1 °/s and 0.5 °/h, respectively.


Rotational gyroscope Differential capacitance detection pair 



The work presented in this paper was supported by National Nature Science Foundation of China under Grant No. 91438205.


  1. 1.
    Saukoski, M., Aaltonen, L., Salo, T., Halonen, K.A.I.: Interface and control electronics for a bulk micromachined capacitive gyroscope. Sens. Actuators A 147(1), 183–193 (2008)CrossRefGoogle Scholar
  2. 2.
    Liu, K., et al.: The development of micro-gyroscope technology. J. Micromech. Microeng. 19, 113001 (2009)CrossRefGoogle Scholar
  3. 3.
    Xia, D., Yu, C., Kong, L.: The development of micromachined gyroscope structure and circuitry technology. Sensors 14, 1394–1473 (2014)CrossRefGoogle Scholar
  4. 4.
    Saukoski, M., Aaltonen, L., Halonen, K.A.I.: Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes. IEEE Sens. J. 7, 1639–1651 (2007)CrossRefGoogle Scholar
  5. 5.
    Elsayed, M., Nabki, F., Sawan, M., El-Gamal, M.: A 5 V MEMS gyroscope with 3 aF/°/s sensitivity, 0.6°/√hr mechanical noise and drive-sense crosstalk minimization. In: Proceedings of the 2011 International Conference on Microelectronics (ICM), Hammamet, Tunisia, 19–22 December 2011, pp. 1–5 (2011)Google Scholar
  6. 6.
    Cui, F., Liu, W., Chen, W.-Y., Zhang, W.-P., Wu, X.-S.: Hybrid microfabrication and 5-DOF levitation of micromachined electrostatically suspended gyroscope. Electron. Lett. 47, 976–978 (2011)CrossRefGoogle Scholar
  7. 7.
    Wu, H.M., Yang, H.G., Yin, T., Zhang, H.: Stability analysis of MEMS gyroscope drive loop based on CPPLL. In: Proceedings of the 2011 Asia Pacific Conference on Microelectronics and Electronics, Macao, China, 6–7 October 2011, pp. 45–48 (2011)Google Scholar
  8. 8.
    Mo, B., Liu, X.W., Ding, X.W., Tan, X.Y.: A novel closed-loop drive circuit for the micromechined gyroscope. In: Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, Harbin, China, 5–8 August 2007, pp. 3384–3390 (2007)Google Scholar
  9. 9.
    Feng, L.H., Zhang, Z.X., Sun, Y.N., Cui, F.: Differential pickup circuit design of a kind of Z-axis MEMS quartz Gyroscope. Procedia Eng. 15, 999–1003 (2011)CrossRefGoogle Scholar
  10. 10.
    Fang, R., et al.: A control and readout circuit with capacitive mismatch auto-compensation for MEMS vibratory gyroscope. In: Proceedings of the 11th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), Xi’an, China, 29 October–1 November 2012, pp. 1–3 (2012)Google Scholar
  11. 11.
    Aaltonen, L., Halonen, K.A.I.: An analog drive loop for a capacitive MEMS gyroscope. Analog. Integr. Circuit Signal 63, 465–476 (2010)CrossRefGoogle Scholar
  12. 12.
    Cui, J., Chi, X.Z., Ding, H.T., Lin, L.T., Yang, Z.C., Yan, G.Z.: Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes. J. Micromech. Microeng. 12, 1–17 (2009)Google Scholar
  13. 13.
    Yang, B., Zhou, B.L., Wang, S.R.: A precision closed-loop driving scheme of silicon micromachined vibratory gyroscope. J. Phys: Conf. Ser. 34, 57–64 (2006)Google Scholar
  14. 14.
    Xiao, Q., Luo, Z.: Initial levitation of micromachined electrostatically suspended gyroscope with fuzzy hybrid PI controller. In: Proceedings of the International Conference on Control, Automation, Robotics & Vision, Phuket, Thailand, 13–15 November 2016 (2016)Google Scholar
  15. 15.
    Chen, D., et al.: Friction reduction for a rotational gyroscope with mechanical support by fabrication of a biomimetic superhydrophobic surface on a ball-disk shaped rotor and the application of a water film bearing. Micromachines 8, 223 (2017)CrossRefGoogle Scholar
  16. 16.
    Chen, D., et al.: A rotational gyroscope with a water-film bearing based on magnetic self-restoring effect. Sensors 18(2), 415 (2018)CrossRefGoogle Scholar

Copyright information

© ICST Institute for Computer Sciences, Social Informatics and Telecommunications Engineering 2018

Authors and Affiliations

  1. 1.Communication Research CenterHarbin Institute of TechnologyHarbinChina

Personalised recommendations