A Static SIMS Study of Interfaces between Evaporated Metal Films and Polyimides
Static SIMS has been used to characterize the surfaces of a variety of commercial polyimides and of the interfaces between a polyimide of the PMDA-ODA type and evaporated films of copper and chromium. The commercial materials were all contaminated with organic and inorganic materials: the most common one is a free anhydride. The spectra obtained from the metal-PI interfaces are initially different for Cu and Cr but become identical after a post-deposition annealing treatment. A possible mechanism for the metal-polymer interaction based on the SIMS results is presented.
KeywordsFull Scale Metal Film Primary Beam Peel Strength Polyamic Acid
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