Molecular Manufacturing pp 189-213 | Cite as
New Devices Made from Combining Silicon Microfabrication and Conducting Polymers
Abstract
Conducting polymers have been developed primarily for macroscopic use in batteries, electromagnetic shielding, coatings, displays, and solar cells (commercial applications have been discussed by Schoch and Saunders, 1992, and Studt, 1991). Chief among their attributes is their high conductivity in the doped state, which approaches that of copper (for an introduction, see Kaner and MacDiarmid, 1988; Reynolds, 1988; or Kanatzidis, 1990). This is due to the pattern of alternating single and double bonds, or conjugation, that gives them their other commonly used name, “conjugated polymers”. (See Figure 1.) Dopants added to the material donate (or remove) electrons from the chain, delocalizing the electron cloud in the immediate vicinity and distorting the bond lengths. This results in the formation of bond alternation domain walls (called solitons or polarons and bipolarons, depending on whether the material has a degenerate ground state) which have energy levels within the polymer’s band gap. At high doping levels, they can link together to form energy bands through which the electrons can travel. Charge is thought to hop between polymer chains Because conductivity is higher along a chain than between chains, stretching a sheet of conducting polymer, which orients the chains, results in conductivity anisotropies as high as 100–1000 (e.g. Schimmel et al., 1991).
Keywords
Polymer Electrolyte Conducting Polymer Schottky Diode Sacrificial Layer Hydraulic SupportPreview
Unable to display preview. Download preview PDF.
References
- Akhtar, M., Weakliem, H. A., Paiste, R. M., and Gaughan, K., 1988, Synth. Met. 26: 203CrossRefGoogle Scholar
- Assadi, A., Spetz, A., Willander, M., Svensson, C., Lundström, I., and Inganäs, 0., 1994, Sensors and Actuators B, 20: 71.Google Scholar
- Assadi, A., Svensson, C., Willander, M., and Inganäs, 0., 1988, Appl. Phys. Lett., 53: 195.CrossRefGoogle Scholar
- Assadi, A., Svensson, C., Willander, M., and Inganäs, 0., 1992, J. Appl. Phys., 72: 2900.Google Scholar
- Ataka, M., Omodaka, A., and Fujita, H., The 7th International Conference on Solid-State Sensors and Actuators, Transducers ‘83, Yokohama, Japan, June 7–10, 1993, Digest of Technical Papers, p. 38.Google Scholar
- Baker, C. K., Qiu, Y.J., and Reynolds, J. R., 1991, J. Phys. Chem., 95: 4446.CrossRefGoogle Scholar
- Bantikassegn, W., Dannetun, P., Inganäs, 0., and Salaneck, W. R., 1993, Thin Solid Films, 224: 232.CrossRefGoogle Scholar
- Bartlett, P. N., Archer, P. B. M., and Ling-Chung, S. K., 1989a, Sensors and Actuators, 19: 125CrossRefGoogle Scholar
- Bartlett, P. N., Archer, P. B. M., and Ling-Chung, S. K., 1989b, Sensors and Actuators, 19: 141.CrossRefGoogle Scholar
- Bartlett, P. N., Archer, P. B. M., and Ling-Chung, S. K., 1989c, Sensors and Actuators, 20: 287.CrossRefGoogle Scholar
- Baughman, R.H., Shacklette, L. W., Elsenbaumer, R. L., Plichta, E. J., and Becht, C., 1991, in MolecularGoogle Scholar
- Electronics, (Ed. Lazarev P.I.), Kluwer Academic Publishers, Dordrecht, pp. 267–89.Google Scholar
- Becker, E.W., Ehrfeld, W., Hagmann, P., Maner, A., and Munchmeyer, D., 1986, Microelectronic Eng., 4:35.Google Scholar
- Berggren, M., Gustafsson, G., Inganäs, O., Andersson, M. R., Hjertberg, T., and Wennerström, O., 1994, Appl. Phys. Lett., submitted.Google Scholar
- Berggren, M., Gustafsson, G., Inganäs, O., Andersson, M. R., Wennerström, O., and Hjertberg, T., 1994, Adv. Mat., 6: 488.CrossRefGoogle Scholar
- Bidan, G., 1992, Sensors and Actuators B, 6: 45.CrossRefGoogle Scholar
- Bilger, R., and Heinz, J., 1993, Synth. Met., 55–57: 1424CrossRefGoogle Scholar
- Braun, D., and Heeger, A. J., 1991, App/. Phys. Lett.58:1982. Google Scholar
- Burroughes, J. H., Bradley, D. D. C., Brown, A. R., Marks, R. N., Mackay, K., Friend, R. H., Bums, P. L., and Holmes, A. B., 1990, Nature, 347: 39.CrossRefGoogle Scholar
- Burroughes, J. H., Jones, C. A., and Friend, R. H., 1988, Nature, 335: 137.CrossRefGoogle Scholar
- Cahalane, W., and Labes, M. M., 1989, Chem. Mat., 1: 519.CrossRefGoogle Scholar
- Cai, Z., Lei, J., Liang, W., Menon, V., and Martin, C. R., 1991, Chem. Mater., 3: 960.Google Scholar
- Clery, D., 1994, Science263:1700. Google Scholar
- Coghlan, A., New Scientist, 1994, Feb. 5: 20.Google Scholar
- Delapierre, G., 1989, Sensors and Actuators, 17: 123.CrossRefGoogle Scholar
- Engelmann, G., Ehrmann, O., Leutenbauer, R., Schmitz, H., and Reichl, H., 1993, MME’93 Workshop Digest, September 7–8, Neuchatel, p. 85.Google Scholar
- Frazier, A.B., and Allen, M. G., 1993, J. Microelectromech. Syst., 2: 87.CrossRefGoogle Scholar
- Fujii, M., Arii, K., and Yoshini, K., 1993, Synth. Met., 55–57: 1159.CrossRefGoogle Scholar
- Gamier, F., Horowitz, G., Peng, X., and Fichou, D., 1990, Adv. Mater. 2: 592.CrossRefGoogle Scholar
- Granström, M., and Inganäs, 0., 1993, Synth. Met. 55–57: 460.CrossRefGoogle Scholar
- Greenham, N C, Moratti, S. C., Bradley, D. D. C., Friend, R. H., and Holmes, A. B., 1993, Nature 365: 628.CrossRefGoogle Scholar
- Grem, G., Leditzky, G., Ullrich, B., and Leising, G., 1992, Adv. Mat. 4: 36.CrossRefGoogle Scholar
- Guckel, H., Christenson, T. R., Skrobis, K. J., Denton, D. D., Choi, B., Lovell, E. G., Lee, J. W., Bajikar, S. S., and Chapman, T. W., Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, June 4–7 1990, p. 118.Google Scholar
- Gustafsson, G., Cao, Y, Treacy, G. M., Klavetter, F., Colaneri, M., and Heeger, A. J., 1992, Nature 357: 477.CrossRefGoogle Scholar
- Gustafsson, J. C., Inganäs, O., and Anderson, A. M., 1994, Synth. Met. 62: 17.CrossRefGoogle Scholar
- Heinze, J., 1991, Synth. Met. 41–43: 2805.Google Scholar
- Heinze, J., and Dietrich, M., 1989, Mat. Sci. Forum 42: 63.Google Scholar
- Hunter, LW., and Lafontaine, S., Technical Digest of the IEEE Solid State Sensor and Actuator Workshop, Hiton Head, June 22–25 1992, p. 178.Google Scholar
- Inganäs, 0., Gustafsson, G., and Svensson, C., 1991, Synth. Met. 41–43: 1095.Google Scholar
- James, A. M., and Lord, M. P., Macmillan’s Chemical and Physical Data, Macmillan Press Ltd., London, 1992, pp. 20, 22.Google Scholar
- Kanatzidis, M. G., 1990, Chem and Eng. News, Dec. 3: 36.Google Scholar
- Kaner, R. B., and MacDiarmid, A.G., 1988, Sci. Amer. 2: 60–65.Google Scholar
- Kankare, J., and Lukkari, J., 1993, Synth. Met. 55–57: 1305.CrossRefGoogle Scholar
- Krishna, V., Ho, Y-H., Basak, S., and Rajeshwar, K., 1991, J. Am. Chem. Soc. 113: 3325.CrossRefGoogle Scholar
- Li, Y., and Qian, R., 1989, Synth. Met. 28: C127.CrossRefGoogle Scholar
- Lukkari, J, Heikkila, L., Alanko, M., and Kankare, J., 1993, Synth. Met. 55–57: 1311.CrossRefGoogle Scholar
- Martin, C. R., 1991, Adv. Mat. 3: 457.CrossRefGoogle Scholar
- Martin, C. R., Van Dyke, L. S., Cai, Z., and Liang, W., 1990, J. Am. Chem. Soc. 112: 8976.CrossRefGoogle Scholar
- Mastragostino, M., Arbizzani, C, Bongini, A., Barbarella, G., and Zambianchi, M., 1993, Electrochimica Acta 38: 135.CrossRefGoogle Scholar
- Murthy, N.S., Shacklette, L. W., and Baughman, R. H., 1987, J. Chem. Phys. 87: 2346.Google Scholar
- Naoi, K., Lien, M., and Smyrl, W. H., 1991, J. Electrochem. Soc. 138: 440.CrossRefGoogle Scholar
- Orata, D., and Buttry, D. A., 1987, J. Am. Chem. Soc. 109: 3574.CrossRefGoogle Scholar
- Osada, Y., 1987, Adv. Polym. Sci. 82: 1.CrossRefGoogle Scholar
- Otero, T. F., and de Larreta, E., 1988,Synth. Met.. 26:79.Google Scholar
- Otero, T. F., and Rodriguez, J., 1993, Synth. Met.. 55–57: 1436.Google Scholar
- Paul, E. W., Rico, A. J., and Wrighton, M. S., 1985,1 Phys. Chem. 89: 1441.Google Scholar
- Pearce, T. C., Gardner, J. W., Friel, S., Bartlett, P. N., and Blair, N., 1993, Analyst, 118: 371.CrossRefGoogle Scholar
- Pei, Q., and Inganäs, O., 1992a, Adv. Mat. 4: 277.CrossRefGoogle Scholar
- Pei, Q., and Inganäs, O., 1992b, J. Phys. Chem. 96: 10507.CrossRefGoogle Scholar
- Pei, Q., and Inganäs, O., 1993a, Synth. Met. 55–57: 3724.CrossRefGoogle Scholar
- Pei, Q., and Inganäs, O., 1993b, J. Phys. Chem. 97: 6034.CrossRefGoogle Scholar
- Pei, Q., and Inganäs, 0., 1993c, Solid State Ionics 60: 161.CrossRefGoogle Scholar
- Pei, Q., and Inganäs, O., 1993d, Synth. Met. 57: 3718.CrossRefGoogle Scholar
- Pei, Q., and Inganäs, 0., 1993e, Synth. Met. 55–57: 3730.CrossRefGoogle Scholar
- Penner, R.M., and Martin, C.R., 1986, J. Electrochem. Soc. 133: 2206.CrossRefGoogle Scholar
- Pister, K.S.J., Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, June 22–25 1992, p. 136.Google Scholar
- Reynolds, J.R., 1988, Chemtech 7: 440.Google Scholar
- Schimmel, Th., Gläser, D., Schwoerer, M., and Naarmann, H., 1991, in Conjugated Polymers, (Eds. J.L. Brédas and R. Silbey), Kluwer Academic Publishers, Dordrecht, p. 49.Google Scholar
- Schoch, K.F., and Saunders, H.E., 1992, IEEE Spectrum 6: 52–55.CrossRefGoogle Scholar
- Scrosati, B.,1988, Prog. Solid St. Chem. 18: 1.Google Scholar
- Smela, E., and Inganäs, O., in preparation.Google Scholar
- Smela, E., Inganäs, O., and Lundström, I., 1993a, J. Micromech. Microeng. 3: 203.CrossRefGoogle Scholar
- Smela, E., Inganäs, 0., Pei, Q., and Lundström, I., 1993b, Adv. Mat. 5: 630.CrossRefGoogle Scholar
- Smela, E., Zuccarello, G., Kariis, H., Uvdal, K., Inganäs, 0., Liedberg, B., and Lundström, I., in preparation Sperling, L.H., 1986, Introduction to Physical Polymer Science, John Wiley and Sons, New York, pp. 227, 229.Google Scholar
- Street, G.B., in Handbook of Conducting Polymers, (Ed. Skotheim T. A. ), Marcel Dekker, Inc., New York, 1986, 265–91.Google Scholar
- Streetman, B. G., 1980, Solid State Electronic Devices, 2nd Ed., Prentice Hall, Englewood Cliffs. Studt, T., 1991, RandD Mag. 10:94.Google Scholar
- Thakeray, J. W., White, H. S., and Wrighton, M. S., 1985, J. Phys. Chem., 89: 5133.CrossRefGoogle Scholar
- Tomozawa, H., Braun, D., Phillips, S., Heeger, A. J., and Kroemer, H., 1987, Synth. Met.. 22:63.Google Scholar
- Tsumura, A., Koezuka, H., and Ando, T., 1986, Appl. Phys. Lett.. 49: 1210.Google Scholar
- West, K., Jacobsen, T., Zachau-Christiansen, B., Careem, M. A., and Skaarup, S., 1993, Synth. Met., 5557: 1412.CrossRefGoogle Scholar
- Wrighton, M. S., 1986, Science 231: 32.PubMedCrossRefGoogle Scholar
- Yoshino, K., Nakao, K., Morita, S., and Onoda, M., 1989a, Japn. J. App. Phys. 28: 2027.CrossRefGoogle Scholar
- Yoshino, K., Nakao, K., Onoda, M., and Sugimoto, R., 1989b, Solid State Comm. 70: 609.CrossRefGoogle Scholar
- Younse, J.M., 1993, IEEE Spectrum, 11: 27.CrossRefGoogle Scholar
- Zotti, G., 1992, Synth. Met. 51: 373CrossRefGoogle Scholar