A Light Controlled Optical Modulator in Silicon Technology
A light controlled optical modulator is demonstrated which is based on the micromachining and thermal bonding of silicon. It consists of two silicon wafers, one n-type and one p-type bonded to each other so that a pn junction is formed. Using micromachining technique, an optical cavity is prepared with a wall depth of 1 µm bordered on one side by a membrane of about 8.5 µm thickness. Using two light sources with different wavelengths, the intensity of transmitted light from one light source, can be controlled by non-penetrating light from the second light source. The device structure is analyzed by simulation.
KeywordsLithium Niobate Transmitted Intensity Spatial Light Modulator Thermal Bonding Fizeau Interferometer
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