Miniature Resistance Thermometers Based on Ge Films on GaAs

  • V. F. Mitin
Part of the Advances in Cryogenic Engineering book series (ACRE, volume 43)

Abstract

Several types of miniature resistance thermometers based on Ge films have been developed and fabricated. They can operate in the 0.5 to 300, 77 to 400 and 200 to 500 K temperature ranges. The behavior of cryogenic thermometers has been investigated at low temperatures (1.7, 4.2 and 77.4 K) and in magnetic fields up to 14 T.

Keywords

High Magnetic Field GaAs Substrate Sensitive Element Thermal Sensitivity Impurity Diffusion Coefficient 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1998

Authors and Affiliations

  • V. F. Mitin
    • 1
  1. 1.Institute of Semiconductor PhysicsNational Academy of Sciences of UkraineKiev-28Ukraine

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