Excimer Lasers : Practical Excimer Laser Sources

  • Pio Burlamacchi
Chapter
Part of the NATO ASI Series book series (NSSB)

Abstract

Since their first demonstration1 in 1975 rare-gas-halide excimer lasers have been developed with amazing rapidity when compared with the development of previous systems. This new generation of lasers have been indeed described as an ultraviolet revolution and a new gas laser workhorse. The basic similarity in design to CO2 pulsed TEA lasers played a fundamental role in this development.

Keywords

Excimer Laser High Repetition Rate XeCl Laser Marx Generator Unstable Resonator 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Springer Science+Business Media New York 1985

Authors and Affiliations

  • Pio Burlamacchi
    • 1
  1. 1.Dipartimento di EnergeticaUniversity of FlorenceFlorenceItaly

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