Conclusions and Outlook

  • Gerhard Lammel
  • Sandra Schweizer
  • Philippe Renaud
Part of the Microsystems book series (MICT, volume 14)

Abstract

A new type of thermally actuated micromirror capable of one- and two-dimensional scanning has been presented. This work involves a complete study of the thermal bimorph actuator, an adapted inexpensive technological process development, analytical models and simulations for the dynamic behavior of the microscanner, characterization and testing of the devices and finally their evaluation for specific applications. An important feature of the developed microscanner is its simplicity, which makes it a cost effective component. Obtaining high fabrication yields and inexpensive devices is still a great challenge for MEMS components.

Keywords

Porous Silicon Porous Silicon Layer Tunable Filter Mask Level Light Incidence Angle 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2002

Authors and Affiliations

  • Gerhard Lammel
    • 1
  • Sandra Schweizer
    • 1
  • Philippe Renaud
    • 1
  1. 1.Swiss Federal Institute of Technology LausanneEPFLSwitzerland

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