Microscanner Technology

  • Gerhard Lammel
  • Sandra Schweizer
  • Philippe Renaud
Part of the Microsystems book series (MICT, volume 14)

Abstract

The microscanners are based on a simple low-cost process, using standard materials and techniques. This chapter presents the fabrication technologies using standard silicon micromachining [107, 71] and process improvements to achieve acceptable yield and reliable devices for reasonable manufacturing costs.

Keywords

Sacrificial Layer Mirror Curvature Vapour Extraction Bimorph Actuator Shaped Mirror 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2002

Authors and Affiliations

  • Gerhard Lammel
    • 1
  • Sandra Schweizer
    • 1
  • Philippe Renaud
    • 1
  1. 1.Swiss Federal Institute of Technology LausanneEPFLSwitzerland

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