Introduction

  • Gerhard Lammel
  • Sandra Schweizer
  • Philippe Renaud
Part of the Microsystems book series (MICT, volume 14)

Abstract

In this book, we explore the application of MEMS technologies in micro-optical devices that use integrated micro-actuators for scanning mirrors and optical interference plates. These devices, as part of the so-called MOEMS (Micro Opto Electro Mechanical Systems) family, are primarily intended to be used as key components for linear and two-dimensional light beam scanning as well as for tunable optical filters.

Keywords

Deflection Angle Light Modulator Texas Instrument Fraunhofer Institute Magnetic Actuation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2002

Authors and Affiliations

  • Gerhard Lammel
    • 1
  • Sandra Schweizer
    • 1
  • Philippe Renaud
    • 1
  1. 1.Swiss Federal Institute of Technology LausanneEPFLSwitzerland

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