Quantitative Analysis of the Energy-Loss Spectrum

Abstract

This chapter describes some of the spectral-analysis techniques used to obtain quantitative information about the crystallographic structure and chemical composition of a specimen. Although this information is expressed rather directly in the energy-loss spectrum, plural scattering complicates the data recorded from specimens of typical thickness. It is therefore desirable to remove the effects of plural scattering from the spectrum or at least make allowance for them in the analysis procedure.