Fabrication of Thermal Microsystems
Fabrication of thermal microsystems involves techniques that were initially developed for the fabrication of integrated circuits (ICs) and later extended to the fabrication of microelctromechanical systems (MEMS). Analytical and experimental aspects of these techniques have been presented in great detail in many books and, therefore, will not be discussed here. However, the fabrication of thermal microsystem for either commercial applications or microscale heat transfer research imposes contradicting demands. This challenge can be met by utilizing standard microfabrication technologies in a unique and innovative approach. Therefore, only processes and techniques developed and used specifically for the fabrication of the two case studies, i.e. microchannel heat sinks and micro heat pipes, will be described hereafter.
KeywordsHeat Pipe Nitride Layer Metal Line Glass Wafer Etch Mask
Unable to display preview. Download preview PDF.