Studies on the Accuracy of Electron Backscatter Diffraction Measurements

  • Melik C. Demirel
  • Bassem S. El-Dasher
  • Brent L. Adams
  • Anthony D. Rollett

Abstract

Automated orientation measurement on a local basis is now widely accepted for characterization of materials. The technique relies upon indexing of electron backscatter diffraction patterns in a scanning electron microscope. In order to exploit the available information, it is important to understand the limitations with respect to accuracy. Experiments were carried out to measure orientation fields from a silicon single crystal. The orientation dispersion was 1°. Disorientation correlation maps revealed anisotropy in the spatial variation in measured orientation.

Keywords

Pole Figure Electron Backscatter Diffraction EBSD Data EBSD Measurement Float Point Operation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2000

Authors and Affiliations

  • Melik C. Demirel
    • 1
  • Bassem S. El-Dasher
    • 1
  • Brent L. Adams
    • 2
  • Anthony D. Rollett
    • 1
  1. 1.Materials Science & Engineering DepartmentCarnegie Mellon UniversityPittsburghUSA
  2. 2.Department of Mechanical EngineeringBrigham Young UniversityProvoUSA

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