An Automated EBSD Acquisition and Processing System

  • Pierre Rolland
  • Keith G. Dicks

Abstract

An automated EBSD system is a combination of hardware and software designed to operate in harmony. The hardware combines pattern acquisition using a specialized camera and electron image acquisition from the SEM. The software controls data acquisition and processing. The standard SEM image may be used as a reference image, or better, that produced by a dedicated forward scattered electron detector. Examples of the use of the camera, image and EBSD data are given to illustrate the Oxford Instruments EBSD system capabilities.

Keywords

Electron Image Misorientation Angle Inverse Pole Figure Beam Scanning Equivalent Circle Diameter 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Reference

  1. Randle, V., 1998, Data presentation and analysis for electron backscatter diffraction, Oxford Instruments Application note.Google Scholar

Copyright information

© Springer Science+Business Media New York 2000

Authors and Affiliations

  • Pierre Rolland
    • 1
  • Keith G. Dicks
    • 1
  1. 1.Oxford Instruments AnalyticalHigh Wycombe, BucksEngland

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