Analog Data Acquisition Circuits in Integrated Sensing Systems

  • Kensall D. Wise

Abstract

This paper discusses current worldwide efforts aimed at the development of integrated microinstrumentation systems. Such systems are merging sensors, actuators, analog interface circuits, and embedded microcontrollers on common substrates to implement distributed measurement/control functions that are able to respond to a variety of conditions and which fit into a hierarchical control structure. Digital compensation of offset, slope, and temperature sensitivities appears capable of extending the precision of such systems by an order of magnitude or more provided the analog front-end is stable over time. While linearity is becoming less important in such systems, low-noise, low power, and small layout area continue to be key design goals. New force-balanced, resonant, and tunneling operating modes are largely unexplored in terms of integrated readout circuitry. In addition, the development of analog self-test and autocalibration procedures along with improved compensation protocols and test strategies offer many new challenges. Examples of highly-integrated analog front-ends for such systems are given in three areas: integrated circuitry for exploring neural networks at the cellular level, an integrated microflowmeter offering over 10 bits of accuracy and 16 hits of dynamic range, and an integrated gas analyzer based on ultrathin sensing films and precise temperature control. All of these devices are partially or fully self-testing.

Keywords

Pressure Sensor Data Converter Capacitive Pressure Sensor Silicon Sensor Advance Project Research Agency 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media Dordrecht 1994

Authors and Affiliations

  • Kensall D. Wise
    • 1
  1. 1.Center for Integrated Sensors and Circuits Department of Electrical Engineering and Computer ScienceThe University of MichiganAnn ArborUSA

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