Fabrication Data

  • Duncan Moore Henry Walker
Chapter
Part of the The Springer International Series in Engineering and Computer Science book series (SECS, volume 33)

Abstract

This chapter describes the collection and use of fabrication line data for tuning VLASIC. We first describe process monitoring. We then describe a set of data taken from an operating fabrication line and its use in developing the defect statistical models described in Chapter 4. We then discuss the problems associated with the data, in particular, why it is insufficient for tuning VLASIC. We discuss how better process monitor design and sampling methods can greatly reduce the effort needed to extract the random number generator parameters.

Keywords

Defect Density Defect Type Negative Binomial Distribution Yield Simulation Defect Cluster 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media Dordrecht 1987

Authors and Affiliations

  • Duncan Moore Henry Walker
    • 1
  1. 1.Carnegie Mellon UniversityUSA

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