This chapter describes the collection and use of fabrication line data for tuning VLASIC. We first describe process monitoring. We then describe a set of data taken from an operating fabrication line and its use in developing the defect statistical models described in Chapter 4. We then discuss the problems associated with the data, in particular, why it is insufficient for tuning VLASIC. We discuss how better process monitor design and sampling methods can greatly reduce the effort needed to extract the random number generator parameters.
KeywordsDefect Density Defect Type Negative Binomial Distribution Yield Simulation Defect Cluster
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