Growth from the Vapor

  • Morton E. Jones
  • Don W. Shaw
Chapter
Part of the Treatise on Solid State Chemistry book series (TSSC, volume 5)

Abstract

Growth from the vapor for preparing materials, particularly in the form of thin films, has become an extremely important technique. Probably the best example is its extensive use in the fabrication of silicon semiconductor devices and integrated circuits. Chemical vapor deposition is used to prepare the high-purity polycrystalline silicon, which is then melt-grown into single crystals. Thin silicon films, in which the actual devices and circuits are formed, are grown on slices of these crystals by chemical vapor deposition. Thin layers of silicon dioxide and silicon nitride are vapor-deposited for insulation and surface passivation. Finally, metal interconnect patterns are deposited, generally by vacuum evaporation. Chemical vapor deposition is also used for preparing high-purity metals, such as titanium, zirconium, hafnium, thorium, and chromium, and for a wide variety of other materials. Vacuum evaporation is used for depositing thin layers of many materials for surface coatings. The important present and potential uses of vapor deposition have spurred extensive research on these processes during the past decade. This chapter will discuss the general principles of growth from the vapor. Particular emphasis will be placed on the relative contributions of thermodynamic and kinetic factors to vapor deposition processes. Application of these principles will be illustrated using vapor-phase epitaxial growth as an example.

Keywords

Partial Pressure Deposition Rate Epitaxial Growth Gallium Arsenide Deposition Surface 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Springer Science+Business Media New York 1975

Authors and Affiliations

  • Morton E. Jones
    • 1
  • Don W. Shaw
    • 1
  1. 1.Central Research LaboratoriesTexas Instruments Inc.DallasUSA

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