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Use of Photostimulated Vaporization During Growth of A2B5, A2B6, and A4B6 Films

  • S. N. Maksimovskii
  • P. P. Sidorov
Chapter
Part of the Growth of Crystals book series (GROC, volume 19)

Abstract

The basic features of photostimulated epitaxy have been reviewed [1]. It has been demonstrated that the crystallization rates of epitaxial films during irradiation by light with wavelengths in the range 0.25–1.2μ m increase several times compared with equivalent epitaxial processes and that the substrate surface is effectively cleaned and partially recrystallized before the growth.

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Copyright information

© Springer Science+Business Media New York  1993

Authors and Affiliations

  • S. N. Maksimovskii
  • P. P. Sidorov

There are no affiliations available

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