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Application of Ellipsometry in Studies of the Growth of Crystals and Thin Films

  • V. A. Yakovlev
Chapter
Part of the Growth of Crystals book series (GROC, volume 19)

Abstract

Ellipsometry studies of surfaces and thin films enable information on the optical properties of the studied media to be obtained and thicknesses of thin surface films to be determined. The first developed method was monochromatic ellipsometry, which was limited as such. Recently, spectral ellipsometry (SE) has been extensively developed and has enabled the abilities of the method to be widely expanded.

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© Springer Science+Business Media New York  1993

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  • V. A. Yakovlev

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