Abstract
Speckle interferometry is one of the important measurement methods of deformation on an object with rough surfaces. In this paper, a method which can be applied to a three-dimensional (3-D) shape measurement for dynamic events is proposed. In the method, the differential coefficient distribution of the shape of such an object is detected by giving a known lateral shift in the computer memory in order to analyze using one-shot speckle pattern. The 3-D shape can be reconstructed by integrating the differential coefficient distribution. The method is also applied to the 3-D shape measurement of superfine structure beyond the diffraction limit. Furthermore, the influence of magnitude of lateral shift on shape is discussed.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
Y. Garini, B.J. Vermolen, I.T. Young, From micro to nano: recent advances in high-resolution microscopy. Curr. Opin. Chem. Biol. 16, 3–12 (2005)
R. Heintzman, G. Ficz, Beaking the resolution limit in light microscopy. Brief. Funct. Genomics Proteomics 5, 289–301 (2006)
B. Huang, Super-resolution optical microscopy: multiple choices. Curr. Opin. Chem. Biol. 14, 10–14 (2010)
S.W. Hell, J. Wichmann, Breaking the diffraction resolution limit by stimulated-emission—stimulated-emission-depletion fluorescence microscopy. Opt. Lett. 19, 780–782 (1994)
E. Betzig, G.H. Patterson, R. Sougrat, O.W. Lindwasser, S. Olenych, J.S. Bonifacino, M.W. Davidson, J. Lippincott-Schwartz, H.F. Hess, Imaging intracellular fluorescent proteins at nanometer resolution. Science 313, 1642–1645 (2006)
M.G.L. Gustafsson, Surpassing the lateral resolution limit by a factor of two using structured illumination microscopy. J. Microsc. Oxf. 198, 82–87 (2000)
H. Florian, G. Alexander, A. Sergiu, N. Wiwat, K. Fritz, H. Rainer, Nano-FTIR absorption spectroscopy of molecular fingerprints at 20 nm spatial resolution. Nano Lett. 12, 3973–3978 (2012)
G. Cloud, Optical Methods of Engineering Analysis (Cambridge University Press, New York, 1995), pp. 395–476
D. Malacara, Optical Shop Testing (Wiley, New York, 1992), pp. 501–652
R.S. Sirohi, Speckle Metrology (Marcel Dekker, New York, 1993), pp. 99–234
B.J. Thompson, Selected papers on Electronic Speckle Pattern Interferometry Principles and Practice (SPIE Optical Engineering Press, Bellingham, Washington, 1996), pp. 1–518
Y. Arai, S. Yokozeki, In-plane displacement measurement using electronic speckle pattern interferometry based on spatial fringe analysis method. Opt. Eng. 43, 2168–2174 (2004)
Y. Arai, Electronic Speckle Pattern Interferometry based on spatial information using only two sheets of speckle patterns. J. Mod. Opt. 61, 297–306 (2014)
Y. Arai, Improvement of measuring accuracy of spatial fringe analysis method using only two speckle patterns in electronic speckle pattern interferometry. Opt. Eng. (2014). https://doi.org/10.1117/1.oe.53.3.034107
Y. Arai, Development of in-plane and out-of-plane deformation simultaneous measurement method for the analysis of buckling. Opt. Eng. 54 (2015). https://doi.org/10.1117/1.oe.54.2.024102
Y. Arai, Simultaneous in-plane and out-of-plane deformation measurement by speckle multi-recording method. Measurement 91, 582–589 (2016)
Y. Arai, Influence of error sources in speckle interferometry using only two speckle patterns. Opt. Eng. 55 (2016). https://doi.org/10.1117/1.oe.55.12.124101
Y. Arai, Measurement of buckling deformation using speckle interferometry with same sensitivity in three-dimensions. Opt. Eng. 56 (2017). https://doi.org/10.1117/1.oe.56.4.044102
E.B. Flynn et al., Three-wavelength electronic speckle pattern interferometry with the Fourier-transform method for simultaneous measurement of microstructure-scale deformations in three dimensions. Appl. Opt. 45, 3218–3225 (2006)
S. Schedin et al., Simultaneous three-dimensional dynamic deformation measurements with pulsed digital holography. Appl. Opt. 38, 7056–7062 (1999)
T. Takatsuji et al., Simultaneous measurement of three orthogonal components of displacement by electronic speckle-pattern interferometry and the Fourier transform method. Appl. Opt. 36, 1438–1445 (1997)
A. Martinez et al., Three-dimensional deformation measurement from the combination of in-plane and out-of-plane electronic speckle pattern interferometers. Appl. Opt. 24, 4652–4658 (2004)
C. Joenathan et al., Large in-plane displacement measurement in dual-beam speckle interferometry using temporal phase measurement. J. Mod. Opt. 45, 1975–1984 (1998)
C. Joenathan et al., Speckle interferometry with temporal phase evaluation for measuring large-object deformation. Appl. Opt. 37, 2608–2614 (1998)
Y. Arai, Three-dimensional shape measurement beyond the diffraction limit of lens using speckle interferometry. Mod. Opt. (2018). https://doi.org/10.1080/09500340.2018.147026
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2019 Springer Nature Singapore Pte Ltd.
About this paper
Cite this paper
Arai, Y. (2019). Three-Dimensional Shape Measurement Beyond Diffraction Limit for Measurement of Dynamic Events. In: Martínez-García, A., Bhattacharya, I., Otani, Y., Tutsch, R. (eds) Progress in Optomechatronic Technologies . Springer Proceedings in Physics, vol 233. Springer, Singapore. https://doi.org/10.1007/978-981-32-9632-9_1
Download citation
DOI: https://doi.org/10.1007/978-981-32-9632-9_1
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-32-9631-2
Online ISBN: 978-981-32-9632-9
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)