Abstract
As previously noted, this chapter describes the effect of UV (ultraviolet) irradiation on the pyrolysis of oxide precursors. In the pyrolysis process of oxide materials, heat is the usual energy source to decompose starting materials to the final products (solids). However, when UV light is used in a pyrolysis process together with heat, a tremendous effect is expected. In this chapter, we present experimental results concerning the UV irradiation under an oxygen atmosphere (UV/O3 treatment) or nitrogen atmosphere to semiconductor (in Sect. 17.1) and insulator (in Sect. 17.3) precursor films. Using this technology, we demonstrated the second example of an all-liquid-processed TFTin Sect. 17.2. The UV irradiation is not only effective for enhancing the properties of oxide films but also can lower the process temperature and be used as a patterning tool. When the UV irradiation technology is used in combination with solvothermal synthesis of solution, which was already described in Chap. 13, it enables the low-temperature solidification of oxide materials at less than 200 °C, as described in Sect. 17.3. In Sect. 17.4, the solidification mechanism of oxide precursor including UV irradiation treatment is fully studied in detail taking an InO cluster gel as a specimen. The cluster gel is an assembly of hybrid clusters, which has In–O cores coordinated with organic ligand molecules. As the structure and composition of cluster gel is clearly understood, this specimen is an ideal material for investigating the mechanism of UV irradiation. It is found that the UV reactions generate new carbon bonds having higher binding energy. The combination of thermal and UV treatments makes possible the growth of fine In–O crystals with reduced (2%) carbon elements. The UV irradiation is not restricted to a tool assisting in the pyrolysis process, but it can be used as a patterning tool of precursor gel films. After confirming the ability of UV light to pattern various materials, we fabricate TFTs only using UV light as a patterning method and demonstrated the operation of the TFT, as described in Sect. 17.5.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, H. Hosono, Nature 432(488) (2004)
H. Yabuta, M. Sano, K. Abe, T. Aiba, T. Den, H. Kumomi, K. Nomura, T. Kamiya, H. Hosono, Appl. Phys. Lett. 89, 112123 (2006)
K. Nomura, A. Takagi, T. Kamiya, H. Ohta, M. Hirano, H. Hosono, Jpn. J. Appl. Phys. Part 1. 45, 4303 (2006)
T. Iwasaki, N. Itagaki, T. Den, H. Kumomi, K. Nomura, T. Kamiya, H. Hosono, Appl. Phys. Lett. 90, 242114 (2007)
B. Yaglioglu, H.Y. Yeon, R. Beresford, D.C. Paine, Appl. Phys. Lett. 89, 062103 (2006)
P. Arquinha, A. Pimente, A. Marques, L. Pereira, R. Martins, E. Fortunato, J. Non-Cryst. Solids 352, 1749 (2006)
H.Q. Chiang, J.F. Wager, R.L. Hoffman, J. Jeong, D.A. Keszler, Appl. Phys. Lett. 86, 013503 (2005)
W.B. Jackson, R.L. Hoffman, G.S. Herman, Appl. Phys. Lett. 87, 193503 (2005)
P. Gorrn, M. Sander, J. Meyer, M. Kroger, E. Becker, H.-H. Johannes, W. Kowalsky, T. Riedl, Adv. Mater. 18, 738 (2006)
R.L. Hoffman, Solid State Electron. 50, 784 (2006)
T. Miyasako, M. Senoo, E. Tokumitsu, Appl. Phys. Lett. 86, 162902 (2005)
M.S. Grover, P.A. Hersh, H.Q. Chiang, E.S. Kettenring, J.F. Wager, D.A. Keszler, J. Phys. D 40, 1335 (2007)
K.J. Saji, M.K. Jayaraj, K. Namura, T. Kamiya, H. Hosono, J. Electrochem. Soc. 155, H390 (2008)
T. Kamiya, K. Nomura, H. Hosono, Sci. Technol. Adv. Mater. 11, 044305 (2010)
D. Kim, C.Y. Koo, K. Song, Y. Jeong, J. Moon, Appl. Phys. Lett. 95, 103501 (2009)
Y.H. Kim, M.K. Han, J.I. Han, S.K. Park, IEEE Trans. Electron Devices 57, 1009 (2010)
S. Jeong, Y.-G. Ha, J. Moon, A. Facchetti, T.J. Marks, Adv. Mater. 22, 1346 (2010)
D. Kim, Y. Jeong, C. Y. Koo, K. Song, J. Moon, Jpn. J. Appl. Phys. Part 1. 49, 05EB06 (2010)
G.H. Kim, W.H. Jeong, H.J. Ki, Phys. Status Solidi A 207(7), 1677 (2010)
Y. Wang, S.W. Liu, X.W. Sun, J.L. Zhao, G.K.L. Goh, Q.V. Vu, H.Y. Yu, J. Sol-Gel Sci. Technol. 55, 322 (2010)
Y.-H. Kim, J.-S. Heo, T.-H. Kim, S. Park, M.-H. Yoon, J. Kim, M.S. Oh, G.-R. Yi, Y.-Y. Noh, S.K. Park, Nature 489, 128 (2012)
P.K. Nayak, M.N. Hedhili, D. Cha, H.N. Alshareef, Appl. Phys. Lett. 100, 202106 (2012)
K. Umeda, T. Miyasako, A. Sugiyama, A. Tanaka, M. Suzuki, E. Tokumitsu, T. Shimoda, J. Appl. Phys. 113, 1845209 (2013)
M.L. Hair, J. Non-Cryst. Solids 19, 299 (1975)
M. Ivanda, S. Music, S. Popovic, M. Gotic, J. Mol. Struct. 480, 645 (1999)
N. Nakayama, Y. Tsuchiya, S. Tamada, K. Kosuge, S. Nagata, K. Takahiro, and S. Yamaguch, Jpn. J. Appl. Phys. Part 2 32, L1465 (1993)
R.O. Dillon, J.A. Woollam, V. Katkanant, Phys. Rev. B 29, 3482 (1984)
A.C. Ferrari, J. Robertson, Phys. Rev. B 61, 14095 (2000)
K. Nomura, T. Kamiya, H. Ohta, M. Hirano, H. Hosono, Appl. Phys. Lett. 93, 192107 (2008)
J.S. Park, W.-J. Maeng, H.-S. Kim, J.-S. Park, Thin Solid Films 520, 1679 (2012)
J.-Y. Kwon, D.-J. Lee, K.-B. Kim, Electron. Mater. Lett. 7, 1 (2011)
E. Fortunato, P. Barquinha, R. Martins, Adv. Mater. 24, 2945 (2012)
J. Livage, In Sol–Gel Optics Processing and Applications, Ed. L. C. Klein (Kluwer Academic, Dordrecht, 1994), p. 39
T. Miyasako, B.N.Q. Trinh, M. Onoue, T. Kaneda, P.T. Tue, E. Tokumitsu, T. Shimoda, Appl. Phys. Lett. 97, 173509 (2010)
T. Miyasako, B.N.Q. Trinh, M. Onoue, T. Kaneda, P.T. Tue, E. Tokumitsu, T. Shimoda, Jpn. J. Appl. Phys. 50, 04DD09 (2011)
T. Miyasako, M. Onoue, E. Tokumitsu, T. Shimoda, MRS Fall Meet. (2011), S2.8
K. Umeda, T. Miyasakol, A. Sugiyama, A. Tanaka, M. Suzuki, E. Tokumitsu, T. Shimoda, Jpn. J. Appl. Phys. 53, 02BE03 (2014)
H. Kasper, Z. Anorg, Allg. Chem. 349, 113 (1967)
N. Kimizuka, T. Mohri, J. Solid State Chem. 60, 382 (1985)
M. Nakamura, N. Kimizuka, T. Mohri, J. Solid State Chem. 93, 298 (1991)
M. Orita, M. Takeuchi, H. Sakai, H. Tanji, Jpn. J. Appl. Phys. 34, L1550 (1995)
M. Orita, H. Sakai, M. Takeuchi, Y. Yamaguchi, Trans. Mater. Res. Soc. Jpn. 20, 573 (1996)
T. Moriga, D.D. Edwards, T.O. Mason, G.B. Palmer, K.R. Poeppelmeier, J.L. Schindler, C.R. Kannewurf, I. Nakabayashi, J. Am. Ceram. Soc. 81, 1310 (1998)
T. Moriga, D.R. Kammler, T.O. Mason, G.B. Palmer, K.R. Poeppelmeier, J. Am. Ceram. Soc. 82, 2705 (1999)
T. Kaneda et al., Rheology printing for metal-oxide patterns and devices. J. Mater. Chem. C 2, 40–49 (2014)
Y. Murakami, J. Li, D. Hirose, S. Kohara, T. Shimoda, Solution processing of highly conductive ruthenium and ruthenium oxide thin films from ruthenium-amine complexes. J. Mater. Chem. C 3, 4490–4499 (2015)
P. Tue et al., High-performance solution-processed ZrInZnO thin-film transistors. IEEE Trans. Electron Devices 60, 320–326 (2013)
P. Tue, J. Li, T. Miyasako, S. Inoue, T. Shimoda, Low-temperature all-solution-derived amorphous oxide thin-film transistors. IEEE Electron Device Lett. 34, 1536–1538 (2013)
M. Puchberger et al., Can the clusters Zr6O4(OH)4(OOCR)12 and [Zr6O4(OH)4(OOCR)12]2 be converted into each other? Eur. J. Inorg. Chem., 3283–3293 (2006)
R. Mos et al., Synthesis, crystal structure and thermal decomposition of Zr6O4(OH)4(CH3CH2COO)12. J. Anal. Appl. Pyrolysis 97, 137–142 (2012)
J. Li et al., Hybrid cluster precursors of the LaZrO insulator for transistors: properties of high-temperature-processed films and structures of solutions, gels, and solids. Sci. Rep. 6, 29682 (2016). https://doi.org/10.1038/srep29682
D.J. Jacob, Introduction to Atmospheric Chemistry (Princeton University Press, Princeton, 1999), pp. 162–169
H.-J. Deiseroth, H.K. Müller-Buschbaum, Ein Beitrag zur Pyrochlorstruktur an La2Zr2O7. Z. Anorg. Allg. Chem. 375, 152–156 (1970)
C. Loogn, J. Richardson, M. Ozawa, M. Kimura, Crystal structure and short-range oxygen defects in La-modified and Ndmodified ZrO2. J. Alloys Compd. 207, 174–177 (1994)
Y.M. Park, J. Daniel, M. Heeney, A. Salleo, Room-temperature fabrication of ultrathin oxide gate dielectrics for low-voltage operation of organic field-effect transistors. Adv. Mater. 23, 971–974 (2011)
Y.M. Park, A. Desai, A. Salleo, Solution-processable zirconium oxide gate dielectrics for flexible organic field effect transistors operated at low voltages. Chem. Mater. 25, 2571–2579 (2013)
W.-T. Park et al., Facile routes to improve performance of solution-processed amorphous metal oxide thin film transistors by water vapor annealing. ACS Appl. Mater. Interfaces 7, 3289–13294 (2015)
D. Hirose, T. Shimoda, Evaluating the State of Indium-Tin Oxide gels via estimation of their cohesive energy. Jpn. J. Appl. Phys. 53, 02BC01-1-02BC01-7 (2014)
S. Inoue, T.T. Phan, T. Hori, H. Koyama, T. Shimoda, Electrophoretic displays driven by all-oxide thin-film transistor backplanes fabricated using a solution process. Phys. Status Solidi A 212, 2133–2140 (2015)
T. Kaneda, D. Hirose, T. Miyasako, P.T. Tue, Y. Murakami, S. Kohara, J. Li, T. Mitani, E. Tokumitu, T. Shimoda, Rheology printing for metal-oxide patterns and devices. J. Mater. Chem. C 2, 40–49 (2014)
K. Umeda, T. Miyasako, A. Sugiyama, A. Tanaka, M. Suzuki, E. Tokumitsu, T. Shimoda, Impact of UV/O3 treatment on solution-processed amorphous InGaZnO4 thin film transistors. J. Appl. Phys. 113(184509), 1–6 (2013)
Y. Yoshimoto, J. Li, T. Shimoda, Fabrication of total solution-processed all-oxide TFT by UV irradiation-redissolving patterning. Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016, Ishikawa, Japan, 5a-2 (2016)
Y. Yoshimoto, J. Li, and T. Shimoda, Solid conversion behaviors of indium oxide gel consisting of hybrid clusters with thermal- and/or ultraviolet-treatments for low temperature processing, Ceramics International (2018), Ceramics International 44(7), May 2018 doi.org/10.1016/j.ceramint.2018.01.120
New Energy and Industrial Technology Development Organization (NEDO), Research for putting characteristic functional liquid materials into practical use, https://app5.infoc.nedo.go.jp/disclosure/SearchResultDetail. Accessed 3 December 2017. NEDO Annual Report, P14004 (2017)
T. Proffen, S.J.L. Billinge, T. Egami, D. Louca, Structural analysis of complex materials using the atomic pair distribution function — A practical guide. Z. Krist. 218, 132–143 (2003)
P. Zhu, J. Li, P.T. Tue, S. Inoue and T. Shimoda, Hybrid cluster precursors of the LaZrO insulator for transistors: lowering the processing temperature, Scientific Reports, (2018) 8:5934 | DOI:10.1038/s41598-018-24292-4
L.V. Morozova, P.A. Tikhonov, V.B. Glushkova, Physicochemical investigation of the In2O3-HfO2 system in the indium oxide-rich region. Inorg. Mater. 27, 217–220 (1991)
M.S. Arnold, P. Avouris, Z.W. Pan, Z.L. Wang, Field-effect transistors based on single semiconducting oxide nanobelts. J. Phys. Chem. B. 107, 659–663 (2003)
K. Umeda, T. Miyasako, A. Sugiyama, A. Tanaka, M. Suzuki, E. Tokumitsu, T. Shimoda, J. Appl. Phys. 113, 184509, 1–6 (2013)
Y. Yoshimoto, J. Li, T. Shimoda, Presented at APCOT2016, Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016, Ishikawa, Japan, 5a-2 (2016)
Y. Yoshimoto, J. Li, and T. Shimoda, Presented at EM-NANO2017, 6th Int. Symp. on Organic and Inorganic Electronic Materials and Related Nanotechnologies, Fukui, Japan, PO1–25 (2017)
Y. Yoshimoto, J. Li, and T. Shimoda, Development of a direct patterning method for functional oxide thin films using ultraviolet irradiation and hybrid-cluster gels and its application to thin-film transistor fabrication, Applied Physics Express, Volume 11, Number 4, pp. 046501 (2018), DOI: 10.7567/APEX. 11.046501
L. Li, P. Zhu, D. Hirose, S. Kohara, T. Shimoda, Sci. Rep. 6, 29682 (2016)
K. Nagahara, D. Hirose, J. Li, J. Mihara, T. Shimoda, Ceram. Int. 42, 7730 (2016)
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2019 Springer Nature Singapore Pte Ltd.
About this chapter
Cite this chapter
Shimoda, T. (2019). Thin-Film Oxide Transistor by Liquid Process (2): UV and Solvothermal Treatments for TFT Fabrication. In: Nanoliquid Processes for Electronic Devices. Springer, Singapore. https://doi.org/10.1007/978-981-13-2953-1_17
Download citation
DOI: https://doi.org/10.1007/978-981-13-2953-1_17
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-13-2952-4
Online ISBN: 978-981-13-2953-1
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)