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Applications of Thermoelectrical Effect in SiC

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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

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Abstract

This chapter describes the applications of the thermoelectrical effect in silicon carbide for a wide range of applications in harsh environments. The thermoresistive effect in a single SiC layer for temperature sensing is known as thermistor, or resistive temperature detector will be mentioned. The temperature sensing in multiple SiC layers will also be discussed. The chapter also presents the application of SiC for thermal sensors based on the Joule heating effect such as thermal flow sensors, convective accelerometers and convective gyroscopes. Other applications towards gas sensing and cooling of MEMS devices are described.

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Authors and Affiliations

  1. Queensland Micro- and Nanotechnology Centre (QMNC), Griffth University, Brisbane, QLD, Australia

    Toan Dinh

  2. Queensland Micro- and Nanotechnology Centre (QMNC), Griffith University, Brisbane, QLD, Australia

    Nam-Trung Nguyen

  3. School of Engineering and Built Environment, Griffith University, Southport, QLD, Australia

    Dzung Viet Dao

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  1. Toan Dinh
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  2. Nam-Trung Nguyen
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  3. Dzung Viet Dao
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Correspondence to Toan Dinh .

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Dinh, T., Nguyen, NT., Dao, D.V. (2018). Applications of Thermoelectrical Effect in SiC. In: Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors. SpringerBriefs in Applied Sciences and Technology. Springer, Singapore. https://doi.org/10.1007/978-981-13-2571-7_6

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