Abstract
Design of the heater on resistive gas sensors plays an important role since the performance of the gas sensor depends on temperature of the sensing materials. Heater on the SnO2 gas sensor is designed in 3D geometry. The meander structure of heater is designed in such a way that the distribution of temperature is uniform on the sensor. COMSOL Multiphysics 5.0 simulating tool based on finite element method is used to study Joules heating in heater. Temperature of the sensor is maintained in the range of 617–621 K (344–348 °C). Uniform distribution of temperature is found on the surface of the sensors with variation of ±2 °C.
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References
Eason, G., Taguchi, N.: Japanese Patent Application (1962)
Batzill, Matthias, Diebold, Ulrike: Prog. Surf. Sci. 79, 47 (2005)
Leo, G., Rella, R., Siciliano, P., Capone, S., Alonso, J.C., Pankov, V., Ortiz, A.: Sens. Actuators B: Chem. 58(1), 370–374 (1999)
Sberveglieri, G.: Recent developments in semiconducting thin-film gas sensors. Sens. Actuators B: Chem. 23(2–3), 103–109 (1995)
Mitra, P., Chatterjee, A.P., Maiti, H.S.: ZnO thin film sensor. Mater. Lett. 35(1–2), 33–38 (1998)
Karunagaran, B., Uthirakumar, P., Chung, S.J., Velumani, S., Suh, E.-K.: TiO2 thin film gas sensor for monitoring ammonia. In: Materials Characterization, vol. 58 (8–9), pp. 680–684 (2007)
Eranna, G., Runthala, D.P., Gupta, R.P.: Oxide materials for development of integrated gas sensors-a comprehensive review. Crit. Rev. Solid State Mater. Sci. (3–4), 111–188 (2004)
Umbarkar, S.B., Rajput, G.Y., Vasappanavara, R.: Design and analysis of CO2 sensor using COMSOL multiphysics. In: Proceedings COMSOL Conference (2016)
Velmathi, S., Ramshanker, G., Mohan, N., Design, S.: Electro-thermal simulation and geometrical optimization of double spiral shaped microheater on a suspended membrane for gas sensing. In: Proceedings of the 36th Annual Conference on IEEE Industrial Electronics Society, pp. 1258–1262 (2010)
Sujatha, L., Selvakumar, V.S., Aravind, S., Padamapriya, R., Preethi, B.: Design and analysis of micro-heaters using COMSOL multiphysics for MEMS based gas sensor. In: Proceedings of the COMSOL Conference (2012)
Bansal, V., Gurjar, A., Kumar, D., Prasad, B.: 3-D design, electro-thermal simulation and geometrical optimization of spiral platinum micro-heaters for low power gas sensing applications using COMSOL. In: Proceedings COMSOL Conference (2011)
Dugdale, J.S.: The Electrical Properties of Metals and Alloys. Dover Publications (2016)
Swanson, J.G., Campbell, D.S.: The structural and electrical properties of 80: 20 NiCr thin films. Thin Solid Films 1(3), 183–202 (1967)
Matula, R.A.: Electrical resistivity of copper, gold, palladium, and silver. J. Phys. Chem. Ref. Data 8(4), 1147–1298 (1979)
Monika, Dr, Arora, A.: Design and simulation of MEMS based microhotplate as gas sensor. Int. J. Adv. Res. Comput. Eng. Technol. 2(8), 2487–2492 (2013)
Dumitrescu, M., Cobianu, C., Lungu, D., Dascalu, D., Pascu, A., Kolev, S., van den Berg, A.: Thermal simulation of surface micromachined polysilicon hot plates of low power consumption. Sens. Actuators A: Phys. 76(1–3), 51–56 (1999)
Semancik, S., Cavicchi, R.E., Wheeler, M.C., Tiffany, J.E., Poirier, G.E., Walton, R.M., Suehle, J.S., Panchapakesan, B., DeVoe, D.L.: Microhotplate platforms for chemical sensor research. Sens. Actuators B: Chem. 77(1–2), 579–591 (2001)
Cerdà Belmonte, J., Manzano, J., Arbiol, J., Cirera, A., Puigcorbé, J., Vilà, A., Sabaté, N., Gràcia, I., Cané, C., Morante, J.R.: Micromachined twin gas sensor for CO and O2 quantification based on catalytically modified nano-SnO2. Sens. Actuators B: Chem. 114(2), 881–892 (2006)
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Rajput, G.Y., Gofane, M.S., Dhobale, S. (2019). Design of Micro-heater on 3D-SnO2 Gas Sensor. In: Iyer, B., Nalbalwar, S., Pathak, N. (eds) Computing, Communication and Signal Processing . Advances in Intelligent Systems and Computing, vol 810. Springer, Singapore. https://doi.org/10.1007/978-981-13-1513-8_63
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DOI: https://doi.org/10.1007/978-981-13-1513-8_63
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