Abstract
Scanning electron microscope (SEM) is an instrument that can image and analyze specimens using a focused electron beam. When the focused electron beam irradiates a specimen, various signals are generated in consequence of the interaction of the incident electron with atoms in the specimen (Fig. 91.1) (Reimer in Scanning electron microscopy: physics of image formation and microanalysis. Springer Verlag, 1998 [1]). Among the signals generated from the surface of the specimen, secondary electrons (SEs) and backscattered electrons (BSEs) can be detected for observation of shape and composition (material contrast).
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References
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Okano, Y. (2018). Scanning Electron Microscopy. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_91
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DOI: https://doi.org/10.1007/978-981-10-6156-1_91
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