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Scanning Capacitance Microscopy

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Abstract

As shown in Fig. 88.1, a very small MOS (metal–oxide–silicon) structure is formed by contacting the metallic tip of the AFM (Atomic Force Microscopy) to the oxide surface of the silicon sample.

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References

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Authors and Affiliations

  1. Tsukuba Research Laboratory, Nikon Corporation, Tsukuba, Japan

    Nobuyuki Nakagiri

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  1. Nobuyuki Nakagiri
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Correspondence to Nobuyuki Nakagiri .

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  1. Tokyo, Japan

    The Surface Science Society of Japan

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Nakagiri, N. (2018). Scanning Capacitance Microscopy. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_88

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