Abstract
RBS is a method to determine the absolute elemental composition, usually of thin films (t ~ several tens or hundreds nm) deposited on substrates.
This is a preview of subscription content, log in via an institution to check access.
References
Rutherford, E.: LXXIX. The scattering of α and β particles by matter and the structure of the atom, Philosophical Magazine Series 6, 21: 669–688, (1911)
Bragg, W.-H., Kleeman, R.: XXXIX. On the a particle of Radium, and their loss of range in passing through various atoms and molecules, Phil. Mag. Dec. 318–340, (1904)
For example, SIMNRA, (http://home.mpcdf.mpg.de/~mam/)
Huiberts, J.-N., Griessen, R., Rector, J.-H., Wijngaarden, R.-J., Dekker, J.-P., de Groot, D.-G., Koeman, N.-J.: Yttrium and lanthanum hydride films with switchable optical properties. Nature 380, 231–234 (1996)
Sekiba, D., Horikoshi, M., Abe, S., Ishii, S.: Mg segregation in Mg-rich Mg-Ni switchable mirror studied by Rutherford backscattering, elastic recoil detection analysis, and nuclear reaction analysis, J. Appl. Phys. 106, 114912/1–114912/5 (2009)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2018 Springer Nature Singapore Pte Ltd.
About this chapter
Cite this chapter
Sekiba, D. (2018). Rutherford Backscattering Spectrometry. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_87
Download citation
DOI: https://doi.org/10.1007/978-981-10-6156-1_87
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-10-6155-4
Online ISBN: 978-981-10-6156-1
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)