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Compendium of Surface and Interface Analysis pp 381–386Cite as

Microprobe Reflection High-Energy Electron Diffraction

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Abstract

Microprobe reflection high-energy electron diffraction (μ-RHEED) is a reflection high-energy electron diffraction (RHEED) that uses focused electron beams with about 10 nm diameter. The focused electron beams with higher than 10 keV kinetic energy are irradiated on sample surfaces at grazing angles less than 5° to get RHEED patterns from the sample surface nanoareas and analyze their crystallinities.

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References

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Authors and Affiliations

  1. Department of Applied Physics, Graduate School of Engineering, The University of Tokyo, Tokyo, Japan

    Masakazu Ichikawa

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  1. Masakazu Ichikawa
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Correspondence to Masakazu Ichikawa .

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Editors and Affiliations

  1. Tokyo, Japan

    The Surface Science Society of Japan

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Ichikawa, M. (2018). Microprobe Reflection High-Energy Electron Diffraction. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_63

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