Abstract
Medium-energy ion scattering is a method to analyze energy of large-angle scattered ions from a sample using hydrogen or helium ion beam accelerated to about several hundred keV. Fast ions gradually lose their energy mainly due to interaction with electrons in the solid, and only a small portion of the incident ions are scattered in large angle by close collisions between the nuclei.
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References
Copel, M., Gustafsson, T.: Structure of Au(110) determined with medium-energy-ion scattering. Phys. Rev. Lett. 57, 723–726 (1986)
Sayan, S., Garfunkel, E., Nishimura, T., Schulte, W.H., Gustafsson, T.: Thermal decomposition behavior of the HfO2/SiO2/Si System. J. Appl. Phys. 94, 928–934 (2003)
Nishimura, T.: Computer simulation program for medium-energy ion scattering and Rutherford backscattering spectrometry. Nucl. Instrum. Methods B 371, 97 (2016)
Nishimura, T.: MEISwin program. http://www.ionbeam.hosei.ac.jp/en/software.html
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Nishimura, T. (2018). Medium-Energy Ion Scattering. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_61
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DOI: https://doi.org/10.1007/978-981-10-6156-1_61
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