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Low-Energy Ion Scattering Spectroscopy

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Abstract

Low-energy ions scattering (less than 5 keV) is a powerful tool for the analysis of “first monolayer”.

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Authors and Affiliations

  1. Department of Physics, College of Integrated Arts Sciences, Osaka Prefecture University, Sakai, Osaka, Japan

    Kenji Umezawa

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  1. Kenji Umezawa
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Correspondence to Kenji Umezawa .

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  1. Tokyo, Japan

    The Surface Science Society of Japan

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Umezawa, K. (2018). Low-Energy Ion Scattering Spectroscopy. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_56

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