Abstract
The displacement measurement using optical interferometry is based on the observation of an interferogram caused by interfering two reflected lights from a sample surface and a reference mirror surface.
This is a preview of subscription content, log in via an institution to check access.
References
Toda, M., Seo, Y.J., Kawai, Y., Miyashita, H., Ono, T.: Proceedings of the International Microprocesses & Nanotechnology Conference 25, 1P. (2012)
End point detector
Sato, M.K., Toda, M., Inomata, N., Maruyama, H., Okamatsu-Ogura, Y., Arai, F., Ono, T., Ishijima, A., Inoue, Y.: Biophys. J. 106, 2458 (2014)
Mohd, N., Inomata, N., Toan, N.V., Ono, T., Toda, M.: Proceedings of the International Workshop on Nanomechanical Sensors (2016)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2018 Springer Nature Singapore Pte Ltd.
About this chapter
Cite this chapter
Toda, M. (2018). Interferometer Displacement Measurement. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_49
Download citation
DOI: https://doi.org/10.1007/978-981-10-6156-1_49
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-10-6155-4
Online ISBN: 978-981-10-6156-1
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)