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Compendium of Surface and Interface Analysis pp 269–274Cite as

Imaging Ellipsometry

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Abstract

The measured signals in imaging ellipsometry are the change in polarization as the incident radiation interacts with the material structure of interest at each point on the surface.

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References

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  4. Röling, C., Thiesen, P., Meshalkin, A., Achimova, E., Abashkin, V., Prisacar, A., Triduh, G.: J. Non-Cryst. Solids 365, 93–98 (2013)

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Authors and Affiliations

  1. Surface Physics and Characterization Group, National Institute for Materials Science, Tsukuba, Japan

    Akiko N. Itakura

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  1. Akiko N. Itakura
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Correspondence to Akiko N. Itakura .

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Editors and Affiliations

  1. Tokyo, Japan

    The Surface Science Society of Japan

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Itakura, A.N. (2018). Imaging Ellipsometry. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_44

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