Abstract
The millipede concept presented in this chapter is a new approach to storing data at high speed and ultrahigh density. The interesting part is that millipede stores digital information in a completely different way from magnetic hard disks, optical disks, and transistor-based memory chips. The ultimate locality is provided by a tip, and high data rates are a result of massive parallel operation of such tips. As storage medium, polymer films are being considered, although the use of other media, in particular magnetic materials, has not been ruled out. The current effort is focused on demonstrating the millipede concept with areal densities higher than 1 Tb/inch2 and parallel operation of very large two-dimensional (2-D) (up to 64 × 64) atomic force microscopy (AFM) cantilever arrays with integrated tips and write/read/erase functionality. The fabrication and integration of such a large number of mechanical devices (cantilever beams) will lead to what we envision as the very large-scale integration (VLSI) age of micro- and nanomechanics.
In this chapter, the millipede concept for a microelectromechanical systems (MEMS)-based storage device is described in detail. In particular, various aspects pertaining to AFM thermomechanical read/write/erase functions, 2-D array fabrication and characteristics, x, y, z microscanner design, polymer media properties, read channel modeling, servo control and synchronization, as well as modulation coding techniques suitable for probe-based data-storage devices are discussed.
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Abbreviations
- AC:
-
alternating-current
- AC:
-
amorphous carbon
- ADC:
-
analog-to-digital converter
- AFM:
-
atomic force microscope
- AFM:
-
atomic force microscopy
- BP:
-
bit pitch
- DC:
-
direct-current
- DRAM:
-
dynamic random-access memory
- MEMS:
-
microelectromechanical system
- PC:
-
polycarbonate
- PDMS:
-
polydimethylsiloxane
- PECVD:
-
plasma-enhanced chemical vapor deposition
- PES:
-
photoemission spectroscopy
- PES:
-
position error signal
- PMMA:
-
poly(methyl methacrylate)
- SEM:
-
scanning electron microscope
- SEM:
-
scanning electron microscopy
- SRC:
-
sampling rate converter
- STM:
-
scanning tunneling microscope
- STM:
-
scanning tunneling microscopy
- TP:
-
track pitch
- VCO:
-
voltage-controlled oscillator
- VLSI:
-
very large-scale integration
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Binnig, G.K. et al. (2010). The Millipede – A Nanotechnology-Based AFM Data-Storage System. In: Bhushan, B. (eds) Springer Handbook of Nanotechnology. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-02525-9_45
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