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Effect of Residual Stress on Cantilever Type Push–Pull Capacitive Accelerometer Structure

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The Physics of Semiconductor Devices (IWPSD 2017)

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 215))

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Abstract

This paper presents the effect of residual stress on the response of the capacitive push pull accelerometer structure. The effect of residual stresses on the structure was simulated by using finite element method (FEM) based software. A simple model is proposed to trim the offset of the accelerometer deflection due to the residual stress associated with various fabrication processes.

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References

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Acknowledgements

The Authors would like to thank Director SSPL for his kind permission to publish this paper.

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Authors and Affiliations

  1. Solid State Physics Laboratory (DRDO), Lucknow Road, Timarpur, 110054, Delhi, India

    Nidhi Gupta,  Shaveta, Shankar Dutta, Ramjay Pal & Kapil Kumar Jain

Authors
  1. Nidhi Gupta
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  2. Shaveta
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  3. Shankar Dutta
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  4. Ramjay Pal
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  5. Kapil Kumar Jain
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Corresponding author

Correspondence to Nidhi Gupta .

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Editors and Affiliations

  1. Solid State Physics Laboratory, Delhi, India

    R. K. Sharma

  2. Solid State Physics Laboratory, Delhi, India

    D.S. Rawal

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Gupta, N., Shaveta, Dutta, S., Pal, R., Jain, K.K. (2019). Effect of Residual Stress on Cantilever Type Push–Pull Capacitive Accelerometer Structure. In: Sharma, R., Rawal, D. (eds) The Physics of Semiconductor Devices. IWPSD 2017. Springer Proceedings in Physics, vol 215. Springer, Cham. https://doi.org/10.1007/978-3-319-97604-4_144

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