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Deposition and Optimization of Zinc Oxide Thin Film Using Its Nano-colloidal Solution for Various Sensing Applications

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The Physics of Semiconductor Devices (IWPSD 2017)

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 215))

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Abstract

This paper reports the morphology, electrical and optical characterizations of zinc oxide (ZnO) thin films deposited using its nano-colloidal solution by sol-gel technique for various applications such as Acoustic Sensor, FBAR and Gas Acoustic Sensor. The morphological study of deposited film was investigated using Atomic Force Microscopy (AFM). However, the electrical properties of deposited thin film were examined using I–V and C–V characteristics by making a capacitor on a silicon substrate. Also, the optical property such as photoluminescence (PL) of deposited film was measured.

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Acknowledgements

The Authors would like to express their gratitude to the ministry of electronics and information technology (MEITY) for financial support and MRC centre, MNIT Jaipur for characterization facilities.

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Authors and Affiliations

  1. Department of Electronics and Communication Engineering, Malaviya National Institute of Technology Jaipur, Jaipur, 302017, India

    Ashish Kumar, R. P. Yadav & Vijay Janyani

  2. Transducers and Actuators Group, CSIR-Central Electronics Engineering Research Institute (CEERI), Pilani, 333031, Rajasthan, India

    Mahanth Prasad

Authors
  1. Ashish Kumar
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  2. R. P. Yadav
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  3. Vijay Janyani
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  4. Mahanth Prasad
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Corresponding author

Correspondence to Ashish Kumar .

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Editors and Affiliations

  1. Solid State Physics Laboratory, Delhi, India

    R. K. Sharma

  2. Solid State Physics Laboratory, Delhi, India

    D.S. Rawal

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Kumar, A., Yadav, R.P., Janyani, V., Prasad, M. (2019). Deposition and Optimization of Zinc Oxide Thin Film Using Its Nano-colloidal Solution for Various Sensing Applications. In: Sharma, R., Rawal, D. (eds) The Physics of Semiconductor Devices. IWPSD 2017. Springer Proceedings in Physics, vol 215. Springer, Cham. https://doi.org/10.1007/978-3-319-97604-4_138

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