Abstract
Acoustic particle velocity sensor is a tiny sensor based on MEMS to measure particle velocity. It has ultra sensitivity at lower frequency. Design analysis & simulation is carried out to study sensitivity and frequency response of this sensor. Sensitivity achieved 1.5 mV/mm/s over a band width of 10 Hz to 1 kHz. Also fabrication process is described in this paper. Sensor is designed analytically using MATLAB and is simulated in FEM based COMSOL multi-physics software.
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Tulana, S. et al. (2019). Design and Simulation of Acoustic Particle Velocity Sensor. In: Sharma, R., Rawal, D. (eds) The Physics of Semiconductor Devices. IWPSD 2017. Springer Proceedings in Physics, vol 215. Springer, Cham. https://doi.org/10.1007/978-3-319-97604-4_118
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DOI: https://doi.org/10.1007/978-3-319-97604-4_118
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