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Dynamics and Control of Advanced Structures and Machines pp 175–183Cite as

Effect of Lattice Misfit Strain on Surface Acoustic Waves Propagation in Barium Titanate Thin Films

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Abstract

The finite-element approaches are used to the analysis of the properties of acoustoelectronic devices on surface acoustic waves (SAWs) made using thin-film technologies. The device consists of a barium titanate BaTiO3 film placed on a magnesium oxide substrate MgO. The barium titanate (BT) film is studied in the c-, r-, and aa-phases. The interdigital transducer (IDT) is attached to the free surface of the ferroelectric film and consists of a system parallel electrodes (pins) alternately connected to each other via common buses. The commercial software COMSOL is used for two-dimensional finite-element analysis and modeling the processes of excitation and propagation of SAW. The resonance and antiresonance frequencies are calculated for different film thicknesses and values of the lattice misfit strain. The significant influence of the film thickness and strains near the phase transitions and in r-phase on the resonant and antiresonant frequencies is discussed. In addition, a two-dimensional model of a SAW filter consisting of 40 pair pins of transmitting and receiving IDTs spaced 1.8 mm apart is considered. The frequency dependences of scattering parameters (S-parameters) have calculated and are presented.

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Acknowledgements

This study was supported by the Russian Science Foundation under Project No. 14-19-01676.

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Authors and Affiliations

  1. Faculty of Physics, Southern Federal University, Rostov-on-Don, Russia

    P. E. Timoshenko & A. V. Pan‘kin

  2. Southern Scientific Center of the Russian Academy of Science, Rostov-on-Don, Russia

    V. V. Kalinchuk & V. B. Shirokov

Authors
  1. P. E. Timoshenko
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  2. V. V. Kalinchuk
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  3. V. B. Shirokov
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  4. A. V. Pan‘kin
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Editor information

Editors and Affiliations

  1. Institute of Continuous Media Mechanics, Russian Academy of Sciences, Perm, Russia

    Valerii P. Matveenko

  2. Institute of Mechanics and Mechatronics, Vienna University of Technology, Vienna, Austria

    Michael Krommer

  3. Institute of Problems in Mech. Eng., Russian Academy of Sciences, St. Petersburg, Russia

    Alexander K. Belyaev

  4. Institute for Technical Mechanics, Johannes Kepler University of Linz, Linz, Austria

    Hans Irschik

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Timoshenko, P.E., Kalinchuk, V.V., Shirokov, V.B., Pan‘kin, A.V. (2019). Effect of Lattice Misfit Strain on Surface Acoustic Waves Propagation in Barium Titanate Thin Films. In: Matveenko, V., Krommer, M., Belyaev, A., Irschik, H. (eds) Dynamics and Control of Advanced Structures and Machines. Springer, Cham. https://doi.org/10.1007/978-3-319-90884-7_19

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  • DOI: https://doi.org/10.1007/978-3-319-90884-7_19

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  • Publisher Name: Springer, Cham

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  • Online ISBN: 978-3-319-90884-7

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