Abstract
This paper proposes an oscillator circuit based on a phase-locked loop which automatically compensates for the parasitic capacitance of Thin-film Piezoelectric-on-Silicon (TPoS) contour-mode resonators. The circuit enables accurate tracking of the mechanical parameters of the resonators in demanding sensor applications by advantageously combining their favorable Q-factor with the electrical resonance enhancement arising from the automatic cancellation of parallel capacitance. Preliminary results on tracking the resonant frequency of a TPoS resonator due to temperature variations show a temperature coefficient of frequency of 53.4 ppm/°C.
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Baù, M., Ferrari, M., Ferrari, V., Ali, A., Lee, J.EY. (2020). Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit. In: Di Francia, G., et al. Sensors and Microsystems. AISEM 2019. Lecture Notes in Electrical Engineering, vol 629. Springer, Cham. https://doi.org/10.1007/978-3-030-37558-4_41
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DOI: https://doi.org/10.1007/978-3-030-37558-4_41
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