Abstract
There are a variety of optical microscopes in NNCI facilities, including many inside the cleanroom. Because the MEMS devices are so tiny, you may need to check the quality and integrity of your devices after each process. Just remember that some process steps, like a spin coat of photoresist, are light sensitive. Some rooms have darkroom-style amber lighting, but not all, so double-check where it is safe to transport your coated wafer.
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Munro, D. (2019). Imaging and Metrology. In: DIY MEMS. Springer, Cham. https://doi.org/10.1007/978-3-030-33073-6_9
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DOI: https://doi.org/10.1007/978-3-030-33073-6_9
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