Abstract
MEMS devices are complex, and there are many points in the process where something can go wrong. Good advice is to start simple. Use everything at benchtop scale with electronics and components that are off the shelf until you are confident the MEMS sensor or actuator is performing correctly. Then, miniaturize or incorporate one thing at a time until you achieve your final configuration. This will save you a lot of time and frustration in the long run. The following sections are on types of testing you may need to ensure proper performance of your MEMS device.
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Munro, D. (2019). Testing. In: DIY MEMS. Springer, Cham. https://doi.org/10.1007/978-3-030-33073-6_10
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DOI: https://doi.org/10.1007/978-3-030-33073-6_10
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Publisher Name: Springer, Cham
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Online ISBN: 978-3-030-33073-6
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