Abstract
This chapter explains the techniques that are available for fabricating nanostructures and also explain the substrates and wafers, modification of materials, lithography, film deposition, wet and dry etching, wafer bonding and packaging.
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Thangadurai, T.D., Manjubaashini, N., Thomas, S., Maria, H.J. (2020). Fabrication of Nanostructures. In: Nanostructured Materials. Engineering Materials. Springer, Cham. https://doi.org/10.1007/978-3-030-26145-0_11
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DOI: https://doi.org/10.1007/978-3-030-26145-0_11
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