Abstract
From a modeling point of view, the inclusion of adequate physical phenomena is mandatory when analyzing the behavior of new transistor architectures. In particular, the high electric field across the ultra-thin insulator in aggressively scaled transistors leads to the possibility for the charge carriers in the channel to tunnel through the gate oxide via various gate leakage mechanisms (GLMs). In this work, we study the impact of trap number on gate leakage using the GLM model, which is included in a Multi-Subband Ensemble Monte Carlo (MS-EMC) simulator for Fully-Depleted Silicon-On-Insulator (FDSOI) field effect transistors (FETs). The GLM code described herein considers both direct and trap-assisted tunneling. This work shows that trap attributes and dynamics can modify the device electrostatic characteristics and even play a significant role in determining the extent of GLMs.
The research leading to these results has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 688101 SUPERAID7.
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References
Roy, K., Mukhopadhyay, S., Mahmoodi-Meimand, H.: Leakage current mechanisms and leakage reduction techniques in deep-submicrometer CMOS circuits. Proc. IEEE 91, 305–327 (2003)
Taur, Y., Ning, T.H.: Fundamentals of Modern VLSI Devices. Cambridge University Press, New York (2009)
Medina-Bailon, C., et al.: Assessment of gate leakage mechanism utilizing multi-subband ensemble Monte Carlo. In: 2017 Joint International EUROSOI and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (2017)
Sampedro, C., Gámiz, F., Godoy, A., Valín, R., García-Loureiro, A., Ruiz, F.G.: Multi-Subband Monte Carlo study of device orientation effects in ultra-short channel DGSOI. Solid State Electron. 54(2), 131–136 (2010)
Sampedro, C., Gámiz, F., Godoy, A.: On the extension of ET-FDSOI roadmap for 22 nm node and beyond. Solid State Electron. 90, 23–27 (2013)
Medina-Bailon, C., Padilla, J.L., Sampedro, C., Godoy, A., Donetti, L., Gamiz, F.: Source-to-drain tunneling analysis in FDSOI, DGSOI, and FinFET devices by means of multisubband ensemble Monte Carlo. IEEE Trans. Electron Devices (99), 1–7 (2018)
Medina-Bailon, C., Padilla, J., Sampedro, C., Alper, C., Gámiz, F., Ionescu, A.: Implementation of band-to-band tunneling phenomena in a multi-subband ensemble Monte Carlo simulator: application to silicon TFETs. IEEE Trans. Electron Dev. 64(8), 3084–3091 (2017)
Vandelli, L., et al.: A physical model of the temperature dependence of the current through SiO 2 / HfO 2 stacks. IEEE Trans. Electron Dev. 58(9), 2878–2887 (2011)
Sadi, T., Mehonic, A., Montesi, L., Buckwell, M., Kenyon, A., Asenov, A.: Investigation of resistance switching in SiOx RRAM cells using a 3D multi-scale kinetic Monte Carlo simulator. J. Phys. Condens. Matter 30(8), 084005 (2018)
Jegert, G.C.: Modeling of leakage currents in high-\(\kappa \) dielectrics, Ph.D. dissertation, Technische Universit\(\ddot{a}\)t M\(\ddot{u}\)nchen, M\(\ddot{u}\)nchen, March 2012
Sadi, T., et al.: Advanced physical modeling of SiOx resistive random access memories. In: 2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pp. 149–152 (2016)
Griffiths, D.J.: The WKB approximation. In: Introduction to Quantum Mechanics, chap. 8, pp. 274–297. Prentice Hall, New Jersey (1995)
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Medina-Bailon, C. et al. (2019). Impact of the Trap Attributes on the Gate Leakage Mechanisms in a 2D MS-EMC Nanodevice Simulator. In: Nikolov, G., Kolkovska, N., Georgiev, K. (eds) Numerical Methods and Applications. NMA 2018. Lecture Notes in Computer Science(), vol 11189. Springer, Cham. https://doi.org/10.1007/978-3-030-10692-8_30
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DOI: https://doi.org/10.1007/978-3-030-10692-8_30
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