Abstract
Several types of miniature resistance thermometers based on Ge films have been developed and fabricated. They can operate in the 0.5 to 300, 77 to 400 and 200 to 500 K temperature ranges. The behavior of cryogenic thermometers has been investigated at low temperatures (1.7, 4.2 and 77.4 K) and in magnetic fields up to 14 T.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
V.F. Mitin, Microsensors of temperature, magnetic field, and strain, in: Proc. 15 th Intern. Cryogenic Engineering Conf. (ICEC 15), Genova, Italy, June 7–10, 1994, Cryogenics 34: 437 (1994) ICEC Supplement.
V.F. Mitin and Yu.A. Tkhorik, Production of sensors for different physical parameters on the base of all-purpose and unified technology, in: Proc. 20th Intern. Conf. on Microelectronics (MEL’95), Nis, Serbia, September 12–14, 1995, Vol.2, pp.553–557
V.F. Mitin, Yu.A. Tkhorik and E.F. Venger, New type of thin-film germanium resistance thermometer for use in a wide temperature range, in: Proc. 16th Intern. Cryogenic Engineering Conf /Intern. Cryogenic Materials Conf. (ICEC 16/ICMC), Kitakyushu, Japan, May 20–24, 1996pp.653–656.
L.G. Rubin, B.L. Brandt and H.H. Sample, Some practical solutions to measurement problems encountered at low temperatures and high magnetic fields, Advances in Cryogenic Engineering, Vol.31, pp.1221 (1986).
N.P. Garbar, L.A. Matveeva, V.F. Mtin, Yu.A. Tkhorik, R. Harman, Yu.M. Shvarts and Z. Stroubek, Heavily doped and strongly compensated heteroepitaxial germanium films, Fiz. Tekhn. Poluprov., Vol.21, N 3, pp.393–399 (1987) (Sov. Phys. — Semicond., Vol.21, N 3 (1987)).
V.F. Mitin, E.V. Mozdor and Yu.A. Tkhorik, Two-dimensional percolation in the heteroepitaxial films of germanium, Fiz. Nizk. Temp., Vol. 17, N 9, pp. 1124–1126 (1991) (Sov. J. Low Temp. Phys., Vol.17, N 9 (1991)).
B.I. Shklovskii and A.L. Efros, “Electronic Properties of Doped Semiconductors,” Springer Verlag, Berlin (1984).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1998 Springer Science+Business Media New York
About this chapter
Cite this chapter
Mitin, V.F. (1998). Miniature Resistance Thermometers Based on Ge Films on GaAs. In: Kittel, P. (eds) Advances in Cryogenic Engineering. Advances in Cryogenic Engineering, vol 43. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-9047-4_93
Download citation
DOI: https://doi.org/10.1007/978-1-4757-9047-4_93
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4757-9049-8
Online ISBN: 978-1-4757-9047-4
eBook Packages: Springer Book Archive