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Chemical Vapor Deposition pp 41–61Cite as

Manufacturability

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Abstract

This chapter is different from the rest of the book. It is not directly pertinent to the art or science of CVD; instead it deals with the development process. It provides a framework to increase the efficiency with which processes can be made manufacturable. I believe this framework should be a prerequisite for all process/equipment engineers who hope to work in the microelectronic industry.

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Authors
  1. Srinivasan Sivaram
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© 1995 Springer Science+Business Media New York

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Sivaram, S. (1995). Manufacturability. In: Chemical Vapor Deposition. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-4751-5_3

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  • DOI: https://doi.org/10.1007/978-1-4757-4751-5_3

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4757-4753-9

  • Online ISBN: 978-1-4757-4751-5

  • eBook Packages: Springer Book Archive

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