Diffuse Scattering From Volume Defects in Thin Layers

Abstract

In this chapter we present a detailed theoretical description of diffuse x-ray scattering from structure defects randomly placed in the volume of thin layers. We deal with so called weak defects (point defects and their clusters, small precipitates of another phase in the crystal lattice) as well as with strong defects (dislocations and their pile-ups). The description is based on the theory explained in the monograph [207]. In contrast to this work, we focus our description on defects in thin layers, where the relaxation at the interfaces affects the symmetry of the deformation field and consequently influences the reciprocal space distribution of scattered intensity.