Abstract
To use the X-rays generated when the electron beam strikes a TEM specimen, we have to detect them first and then identify them as coming from a particular element. This is accomplished by X-ray spectrometry, which is one way we can transform a TEM into a far more powerful instrument, called an analytical electron microscope (AEM). Currently, the only kind of X-ray spectrometer that we use in an AEM is an X-ray energy-dispersive spectrometer (XEDS), which comprises a detector interfaced to signal-processing electronics and a computer-controlled multichannel analyzer (MCA) display. The XEDS is a complex and rather sophisticated piece of instrumentation which takes advantage of modern semiconductor technology. The principal component of the XEDS is a semiconductor detector which has the benefit of being compact enough to fit within the confined region of the TEM stage and, in one form or another, is sensitive enough to detect all the elements above Li in the periodic table.
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References
General References
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Williams, D.B., Carter, C.B. (1996). X-ray Spectrometry. In: Transmission Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-2519-3_32
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DOI: https://doi.org/10.1007/978-1-4757-2519-3_32
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