Abstract
The design of a microbalance vacuum system for obtaining a particular ultimate pressure in the sample region is examined in quantitative detail. The system considered includes the sample container, the hangdown tubes, balance housing, tubulation, and valves that lead to the pump. Since the ultimate pressure is simply the steady state between the gas influx into the system and the pumping speed, the basic equations for calculating the pressure and the effective pumping speed are considered. Then, the sources of total gas influx, such as outgassing of the chamber walls, permeation of gases through the walls, sample outgassing, desorption or outgassing, leaks, and any related temperature effects are considered for baked and unbaked Pyrex glass, quartz, and stainless steel systems. The equations for calculating the effective pumping speed at any point in a vacuum system with different sizes of tubulation and valves are considered. A working system is described to illustrate how the design considerations can be used to obtain the desired performance in a microbalance vacuum system. Finally, the ultimate pressure calculated for various gas loads is compared with the actual performance of the working system.
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Kollen, W., Czanderna, A.W. (1970). Dynamic Vacuum in Microbalance Chambers. In: Massen, C.H., van Beckum, H.J. (eds) Vacuum Microbalance Techniques. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-0725-0_14
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DOI: https://doi.org/10.1007/978-1-4757-0725-0_14
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