About this book series
Future publications in the MEMS Reference Shelf are being directed into the Microsystems and Nanosystems series. To learn more about this series, including a list of published and forthcoming titles, please visit https://www.springer.com/series/11483.
The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS) and Nanotechnology.
MEMS combine mechanical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. Nanotechnology builds on the detailed properties of matter to create new functionality at the atomic and molecular scale.
This series will strive to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner.
The list of topics planned for the series is still growing.
Here is a sample:
- Process Technology
- Materials
- MEMS Packaging
- RF MEMS
- Noise in MEMS
- Self-Assembled Systems
- Piezoelectrics in MEMS
- Inertial MEMS
- Biochemical Analysis
- Power MEMS
- Acoustical MEMS
- Microreactors
- Optical MEMS
- Molecular Manipulation
- Electronic ISSN
- 1936-4415
- Print ISSN
- 1936-4407
- Editor-in-Chief
-
- Stephen Senturia
- Series Editor
-
- Roger T. Howe
Book titles in this series
-
-
Radioisotope Thin-Film Powered Microsystems
- Authors:
-
- Rajesh Duggirala
- Amit Lal
- Shankar Radhakrishnan
- Copyright: 2010
Available Renditions
- Hard cover
- Soft cover
- eBook
-
RF MEMS Switches and Integrated Switching Circuits
- Authors:
-
- Ai-Qun Liu
- Copyright: 2010
Available Renditions
- Hard cover
- Soft cover
- eBook
-
Multi-Wafer Rotating MEMS Machines
Turbines, Generators, and Engines
- Editors:
-
- Jeffrey Lang
- Copyright: 2010
Available Renditions
- Hard cover
- Soft cover
- eBook
-
MEMS Materials and Processes Handbook
- Editors:
-
- Reza Ghodssi
- Pinyen Lin
- Copyright: 2011
Available Renditions
- Hard cover
- eBook