About this book series

Future publications in the MEMS Reference Shelf are being directed into the Microsystems and Nanosystems series. To learn more about this series, including a list of published and forthcoming titles, please visit https://www.springer.com/series/11483.

The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS) and Nanotechnology.

MEMS combine mechanical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. Nanotechnology builds on the detailed properties of matter to create new functionality at the atomic and molecular scale.

This series will strive to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner.

The list of topics planned for the series is still growing.

Here is a sample:

    • Process Technology
    • Materials
    • MEMS Packaging
    • RF MEMS
    • Noise in MEMS
    • Self-Assembled Systems
    • Piezoelectrics in MEMS
    • Inertial MEMS
    • Biochemical Analysis
    • Power MEMS
    • Acoustical MEMS
    • Microreactors
    • Optical MEMS
    • Molecular Manipulation
Electronic ISSN
1936-4415
Print ISSN
1936-4407
Editor-in-Chief
  • Stephen Senturia
Series Editor
  • Roger T. Howe

Book titles in this series

  1. MEMS Reliability

    Authors:
    • Allyson L. Hartzell
    • Mark G. da Silva
    • Herbert R. Shea
    • Copyright: 2011

    Available Renditions

    • Hard cover
    • Soft cover
    • eBook