Electron Kinetics and Applications of Glow Discharges

1. Inductively Coupled Plasmas

   1. Modeling and Diagnostics of Low Pressure Inductively Coupled Plasmas

      • Uwe Kortshagen

      Pages 329-347

   2. Fluid, Kinetic and Hybrid Simulation Strategies for Modeling Chemically Complex Inductively Coupled Plasmas

      • Ming Li, Hiroyuki Date, David B. Graves

      Pages 349-366

   3. Transport and Reaction in Inductively Coupled Plasmas for Microelectronics

      • D. J. Economou, J. Feldsien, R. S. Wise

      Pages 367-390

2. Discharge Kinetics in Molecular Mass

   1. New Trends in the Kinetic Modeling of Discharges in Low Pressure Molecular Gases

      • Carlos M. Ferreira, Boris F. Gordiets

      Pages 391-407

   2. Electron Kinetics in Low-Voltage Cesium-Hydrogen Discharges

      • F. G. Baksht, V. G. Ivanov

      Pages 409-422

3. Magnetized Discharges, Surface Wave Discharges

   1. Surface Wave Sustained Discharges

      • S. Grosse, H. Schlüter, M. Schlüter

      Pages 423-440

   2. Momentum Transfer Theory of Electron Transport in \( \vec E \times \vec B \) Field

      • Zoran Lj. Petrović, Slobodan B. Vrhovac

      Pages 441-458

   3. Hot Electrons in an Expanding Magnetized Hydrogen Plasma

      • D. K. Otorbaev, Zhou Qing, G. J. H. Brussaard, M. C. M. van de Sanden, D. C. Schram

      Pages 459-469

4. Advanced Diagnostics I

   1. Resonance Radiation Transport in Glow Discharge Plasmas

      • J. E. Lawler, J. J. Curry

      Pages 471-487

   2. Optical Characterization of RF Inductively Coupled Plasmas

      • A. E. Wendt, D. F. Beale, W. N. G. Hitchon, E. Keiter, V. Kolobov, L. Mahoney et al.

      Pages 489-502

   3. Experimental Studies of RF Sheaths

      • W. G. Graham, C. M. O. Mahony

      Pages 503-510

   4. Time Resolved Measurements of Pulsed Discharges: The Role of Metastable Atoms in the Afterglow

      • Lawrence J. Overzet, Jennifer Kleber

      Pages 511-523

5. Advanced Diagnostics II

   1. Radio Frequency Capacitive Sheath Diagnostics by Time Resolved Measurements of Fast Electrons

      • A. S. Smirnov, K. E. Orlov

      Pages 525-530

   2. Probe Method for Investigation of Anisotropic Plasma

      • A. P. Mezentsev, A. S. Mustafaev, V. L. Fedorov

      Pages 531-545

6. Back Matter

   Pages 547-557

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This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.

• Pet
• Plasma
• collision
• development
• dynamics
• electron
• fields
• glow discharge
• gold
• kinetics
• physics
• radiation
• semiconductor
• simulation
• wave

• University of Minnesota, Minneapolis, USA

  Uwe Kortshagen

• St. Petersburg State Technical University, St. Petersburg, Russia

  Lev D. Tsendin

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