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Principles of Chemical Vapor Deposition

  • Daniel M. Dobkin
  • Michael K. Zuraw

Table of contents

  1. Front Matter
    Pages i-xi
  2. Daniel M. Dobkin, Michael K. Zuraw
    Pages 1-8
  3. Daniel M. Dobkin, Michael K. Zuraw
    Pages 9-25
  4. Daniel M. Dobkin, Michael K. Zuraw
    Pages 27-67
  5. Daniel M. Dobkin, Michael K. Zuraw
    Pages 69-93
  6. Daniel M. Dobkin, Michael K. Zuraw
    Pages 95-148
  7. Daniel M. Dobkin, Michael K. Zuraw
    Pages 149-194
  8. Daniel M. Dobkin, Michael K. Zuraw
    Pages 195-245
  9. Daniel M. Dobkin, Michael K. Zuraw
    Pages 247-268
  10. Back Matter
    Pages 269-273

About this book

Introduction

Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment.

This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.

Keywords

Natur Technologie chemistry coating development heat transfer manufacturing metal physics pressure transport vapor

Authors and affiliations

  • Daniel M. Dobkin
    • 1
  • Michael K. Zuraw
    • 2
  1. 1.WJ Communications, Inc.San JoseUSA
  2. 2.Fused Metals Inc.GeorgetownCanada

Bibliographic information

  • DOI https://doi.org/10.1007/978-94-017-0369-7
  • Copyright Information Springer Science+Business Media B.V. 2003
  • Publisher Name Springer, Dordrecht
  • eBook Packages Springer Book Archive
  • Print ISBN 978-90-481-6277-2
  • Online ISBN 978-94-017-0369-7
  • Buy this book on publisher's site
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